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 Title: |
US7375404:
Fabrication and integration of polymeric bioMEMS
[ Derwent Title ]
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| Country: |
US United States of America
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| Inventor: |
Park, Jung Jin; Beltsville, MD, United States of America
Ghodssi, Reza; Rockville, MD, United States of America
Rubloff, Gary W.; Clarksville, MD, United States of America
Kastantin, Mark Joseph; Goleta, CA, United States of America
Li, Sheng; Greenbelt, MD, United States of America
Wu, Li-Qun; N. Potomac, MD, United States of America
Yi, Hyunmin; Beltsville, MD, United States of America
Valentine, Theresa Michelle; Potomac, MD, United States of America
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| Assignee: |
University of Maryland Biotechnology Institute, Baltimore, MD, United States of America
University of Maryland, College Park, College Park, MD, United States of America
other patents from UNIVERSITY OF MARYLAND BIOTECHNOLOGY INSTITUTE (731396) (approx. 38)
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| Published / Filed: |
2008-05-20
/ 2004-12-03
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| Application Number: |
US2004000003005
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| IPC Code: |
Advanced:
B01L 3/00;
B81B 7/00;
B81C 3/00;
H01L 27/14;
H01L 29/86;
Core:
H01L 29/66;
more...
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| ECLA Code: |
B01L3/00C6M; B81B7/00P8; B81C3/00D; L01L200/00A8M; L01L200/00M; L01L300/00C2; L01L300/00D4E; L01L300/00G2; L01L300/00G4C; L01L300/00G12; L81B201/05Z; L81D1/00;
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| U.S. Class: |
257/414;
257/040;
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| Field of Search: |
257/414,415,40
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| Government Interest: |
GOVERNMENT LICENSING CLAUSE
The U.S. Government has a paid-up license in this invention and the right in limited circumstances to require the patent owner to license others on reasonable terms as provided for by the terms of Grant No. DMR 4-32291 awarded by the National Science Foundation.
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| Priority Number: |
| 2004-12-03 |
US2004000003005 |
| 2003-12-05 |
US2003000527394P |
| 2004-06-09 |
US2004000578207P |
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| Abstract: |
A micro-electro-mechanical system (MEMS) device is provided, along with means for its fabrication and operation for microfluidic and/or biomicrofluidic applications. The MEMS device includes a substrate, optional electrodes on the substrate, a patterned structure on the substrate, the patterned structure having a fluidic microchannel aligned with one or more of the optional electrodes, an encapsulation membrane covering the microchannel, and an optional reactive layer deposited over the electrode in the microchannel. MEMS devices of preferred embodiments permit a leak-tight seal to be formed around the microchannel and fluidic interconnects established for robust operation of fluidics-based processes. MEMS devices of other preferred embodiments permit reversible attachment and separation of the encapsulation membrane relative to the patterned structure.
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| Attorney, Agent or Firm: |
Edell, Shapiro & Finnan, LLC ;
Auerbach, Jeffrey I. ;
Cohan, June E. ;
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| Primary / Asst. Examiners: |
Nguyen, Tuan H.;
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| INPADOC Legal Status: |
None
Family Legal Status Report
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| Parent Case: |
RELATED APPLICATIONS
This application claims the benefit of priority of U.S. provisional application Ser. No. 60/527,394 filed in the U.S. Patent & Trademark Office on Dec. 5, 2003 entitled “Fabrication and Integration of Polymeric BioMEMS,” the complete disclosure of which is incorporated herein by reference.
This application also claims the benefit of priority of U.S. provisional application Ser. No. 60/578,207 filed in the U.S. Patent & Trademark Office on Jun. 9, 2004 entitled “Micro-Knife-Edge Technique for Sealing of Microfluidic Systems,” the complete disclosure of which is incorporated herein by reference.
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| Family: |
Show 2 known family members
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First Claim:
Show all 40 claims |
1. A micro-electro-mechanical system (MEMS) device, comprising: a substrate; a patterned structure on the substrate, the patterned structure having a microchannel; and an encapsulation layer covering the microchannel, the encapsulation layer being reversibly attachable and separable with respect to the patterned structure; wherein: the patterned structure comprises an epoxy; and the encapsulation layer comprises polydimethylsiloxane.
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| Background / Summary: |
Show background / summary
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| Drawing Descriptions: |
Show drawing descriptions
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| Description: |
Show description
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| Foreign References: |
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| Other References: |
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| Continuity Data: |
| Application Number | Filed | Notes |
|---|
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US2004000003005 | 2004-12-03 | is a
related to the prior publication |
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US20050230767A1 issued 2005-10-20 Fabrication and integration of polymeric bioMEMS
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US2004000003005 | 2004-12-03 | is a
non-provisional of provisional |
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US2004000578207P
| 2004-06-09 |
|
|
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US2004000003005 | 2004-12-03 | is a
non-provisional of provisional |
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US2003000527394P
| 2003-12-05 |
|
|
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