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Title: US7428054: Micro-optical sensor system for pressure, acceleration, and pressure gradient measurements
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Country: US United States of America

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19 pages

 
Inventor: Yu, Miao; Boyds, MD, United States of America
Balachandran, Balakumar; Rockville, MD, United States of America

Assignee: University of Maryland, College Park, MD, United States of America
other patents from UNIVERSITY OF MARYLAND (599690) (approx. 282)
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Published / Filed: 2008-09-23 / 2005-01-21

Application Number: US2005000038156

IPC Code: Advanced: G01B 9/02; G01D 5/353; G01H 9/00; G02B 6/00; G02B 6/34;
Core: G01D 5/26; more...

ECLA Code: G01D5/353F; G01H9/00C2; G02B6/34B6;

U.S. Class: 356/480; 356/519; 385/012;

Field of Search: 356/477,478,480,502,505,506,519 385/012,13

Priority Number:
2005-01-21  US2005000038156
2002-10-15  US2002000270277
2004-05-07  US2004000569296P

Abstract:     A micro-optical fiber tip based sensor system for pressure, acceleration, and pressure gradient measurements in a wide bandwidth, the design of which allows for multiplexity of the input side of the system is based on micro-electromechanical fabrication techniques. The optical portion of the system is based on low coherence fiber-optic interferometry techniques which has a sensor Fabry-Perot interferometer and a read-out interferometer combination that allows a high dynamic range and low sensitivity to the wavelength fluctuation of the light source. A phase modulation and demodulation scheme takes advantage of the Integrated Optical Circuit phase modulator and multi-step phase-stepping algorithm for providing high frequency and real time phase signal demodulation. The system includes fiber tip based Fabry-Perot sensors each of which has a diaphragm that is used as a transducer.

Attorney, Agent or Firm: Rosenberg, Klein & Lee ;

Primary / Asst. Examiners: Connolly, Patrick; Richey, Scott M

INPADOC Legal Status: None          Buy Now: Family Legal Status Report

       
Related Applications:
Application Number Filed Patent Pub. Date  Title
US2002000270277 2002-10-15    2005-05-31  Fiber tip based sensor system for acoustic measurements


       
Parent Case: REFERENCE TO RELATED APPLICATIONS
    This Utility Patent Application is based on a Provisional Patent Application No. 60/569,296 filed 7 May 2004, and is a Continuation-in-Part of Utility patent application Ser. No. 10/270,277 filed 15 Oct. 2002 now U.S. Pat. No. 6,901,176.

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First Claim:
Show all 16 claims
    1. A micro-optical sensor system for pressure, acceleration, and pressure-gradient measurements, comprising:

at least one sensor including:

at least one substrate having a first and a second surface and a substrate material between said first and second surfaces,

at least a pair of fiber guides formed in said substrate material extending therethrough between said first and second surfaces,

a diaphragm layer formed on said first surface of said at least one substrate, and

at least a pair of optical fibers received in said at least a pair of fiber guides, each of said at least a pair of optical fibers having a fiber tip displaced from said diaphragm layer by a predetermined distance, thereby forming a sensing interferometer having a Fabry-Perot cavity defined between said fiber tip and said diaphragm layer, said fiber tip and said diaphragm layer being optically reflective to form a pair of reflective surfaces of said sensing interferometer; and

at least a further sensor including:

a further substrate having a first and a second surface and a substrate material between said first and second surfaces of said further substrate, said further substrate being attached by said second surface thereof to said diaphragm layer of said at least one substrate,

another diaphragm layer formed on said first surface of said further substrate, and

at least one fiber guide formed in said further substrate in alignment with one of said at least a pair of said fiber guides of said at least one substrate, wherein one of said pair of said optical fibers is received in said at least one fiber guide formed in said further substrate through said one of said at least a pair of said fiber guides of said at least one substrate; and

a data acquisition and processing unit coupled to said at least a pair of optical fibers for calculating an acoustic/vibration parameter to be measured.



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U.S. References: Go to Result Set: All U.S. references   |  No patents reference this one   |   Backward references (34)   |   Citation Link

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Buy PDF- 8pp US5218420  1993-06 Asmar  The Boeing Company Optical resonance accelerometer
Buy PDF- 13pp US5247490  1993-09 Goepel et al.  Martin Marietta Corporation Pressure-compensated optical acoustic sensor
Buy PDF- 11pp US5381229  1995-01 Murphy et al.  Center for Innovative Technology Sapphire optical fiber interferometer
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Buy PDF- 8pp US5408319  1995-04 Halbout et al.  International Business Machines Corporation Optical wavelength demultiplexing filter for passing a selected one of a plurality of optical wavelengths
Buy PDF- 7pp US5459571  1995-10 Dammann et al.  Jenoptik GmbH Multiple control frequency phase modulator in phase modulated interferometer precision distance measuring system
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Buy PDF- 10pp US6008898  1999-12 Furstenau et al.  Deutsche Forschungsanstalt fur Luftund Raumfart e.V. Method and apparatus for measuring acceleration and vibration using freely suspended fiber sensor
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Buy PDF- 12pp US6671055  2003-12 Wavering et al.  Luna Innovations, Inc. Interferometric sensors utilizing bulk sensing mediums extrinsic to the input/output optical fiber
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Foreign References: None

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  • Continuity Data:
    Application Number Filed Notes

    US2005000038156 2005-01-21  is a related to the prior publication
         US20050157305A1 issued 2005-07-21  Micro-optical sensor system for pressure, acceleration, and pressure gradient measurements

    US2005000038156 2005-01-21  is a non-provisional of provisional
    US2004000569296P  2004-05-07

    >US2005000038156< 2005-01-21  is a continuation of
    US2004000569296P  2004-05-07   (pending)

    >US2005000038156< 2005-01-21  is a continuation in part of
    US2002000270277  2002-10-15   (granted)
         US6901176 issued 2005-05-31   Fiber tip based sensor system for acoustic measurements

    11038156   is a continuation in part of
    US2002000270277  2002-10-15
         US6901176 issued 2005-05-31   Fiber tip based sensor system for acoustic measurements


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