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Title: |
US7428054:
Micro-optical sensor system for pressure, acceleration, and pressure gradient measurements
[ Derwent Title ]

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Country: |
US United States of America

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Inventor: |
Yu, Miao; Boyds, MD, United States of America
Balachandran, Balakumar; Rockville, MD, United States of America

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Assignee: |
University of Maryland, College Park, MD, United States of America
other patents from UNIVERSITY OF MARYLAND (599690) (approx. 282)
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Published / Filed: |
2008-09-23
/ 2005-01-21

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Application Number: |
US2005000038156

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IPC Code: |
Advanced:
G01B 9/02;
G01D 5/353;
G01H 9/00;
G02B 6/00;
G02B 6/34;
Core:
G01D 5/26;
more...

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ECLA Code: |
G01D5/353F; G01H9/00C2; G02B6/34B6;

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U.S. Class: |
356/480;
356/519;
385/012;

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Field of Search: |
356/477,478,480,502,505,506,519
385/012,13

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Priority Number: |
| 2005-01-21 |
US2005000038156 |
| 2002-10-15 |
US2002000270277 |
| 2004-05-07 |
US2004000569296P |

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Abstract: |
A micro-optical fiber tip based sensor system for pressure, acceleration, and pressure gradient measurements in a wide bandwidth, the design of which allows for multiplexity of the input side of the system is based on micro-electromechanical fabrication techniques. The optical portion of the system is based on low coherence fiber-optic interferometry techniques which has a sensor Fabry-Perot interferometer and a read-out interferometer combination that allows a high dynamic range and low sensitivity to the wavelength fluctuation of the light source. A phase modulation and demodulation scheme takes advantage of the Integrated Optical Circuit phase modulator and multi-step phase-stepping algorithm for providing high frequency and real time phase signal demodulation. The system includes fiber tip based Fabry-Perot sensors each of which has a diaphragm that is used as a transducer.

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Attorney, Agent or Firm: |
Rosenberg, Klein & Lee ;

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Primary / Asst. Examiners: |
Connolly, Patrick; Richey, Scott M

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INPADOC Legal Status: |
None
Family Legal Status Report

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Parent Case: |
REFERENCE TO RELATED APPLICATIONS
This Utility Patent Application is based on a Provisional Patent Application No. 60/569,296 filed 7 May 2004, and is a Continuation-in-Part of Utility patent application Ser. No. 10/270,277 filed 15 Oct. 2002 now U.S. Pat. No. 6,901,176.

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Family: |
Show 6 known family members

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First Claim:
Show all 16 claims |
1. A micro-optical sensor system for pressure, acceleration, and pressure-gradient measurements, comprising: at least one sensor including: at least one substrate having a first and a second surface and a substrate material between said first and second surfaces, at least a pair of fiber guides formed in said substrate material extending therethrough between said first and second surfaces, a diaphragm layer formed on said first surface of said at least one substrate, and at least a pair of optical fibers received in said at least a pair of fiber guides, each of said at least a pair of optical fibers having a fiber tip displaced from said diaphragm layer by a predetermined distance, thereby forming a sensing interferometer having a Fabry-Perot cavity defined between said fiber tip and said diaphragm layer, said fiber tip and said diaphragm layer being optically reflective to form a pair of reflective surfaces of said sensing interferometer; and at least a further sensor including: a further substrate having a first and a second surface and a substrate material between said first and second surfaces of said further substrate, said further substrate being attached by said second surface thereof to said diaphragm layer of said at least one substrate, another diaphragm layer formed on said first surface of said further substrate, and at least one fiber guide formed in said further substrate in alignment with one of said at least a pair of said fiber guides of said at least one substrate, wherein one of said pair of said optical fibers is received in said at least one fiber guide formed in said further substrate through said one of said at least a pair of said fiber guides of said at least one substrate; and a data acquisition and processing unit coupled to said at least a pair of optical fibers for calculating an acoustic/vibration parameter to be measured.

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Background / Summary: |
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Drawing Descriptions: |
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Description: |
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U.S. References: |
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Backward references (34)
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Citation Link

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Foreign References: |
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Continuity Data: |
| Application Number | Filed | Notes |
|
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US2005000038156 | 2005-01-21 | is a
related to the prior publication |
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US20050157305A1 issued 2005-07-21 Micro-optical sensor system for pressure, acceleration, and pressure gradient measurements
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US2005000038156 | 2005-01-21 | is a
non-provisional of provisional |
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US2004000569296P
| 2004-05-07 |
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>US2005000038156< | 2005-01-21 | is a
continuation of |
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US2004000569296P
| 2004-05-07 |
(pending)
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>US2005000038156< | 2005-01-21 | is a
continuation in part of |
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US2002000270277
| 2002-10-15 |
(granted)
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US6901176 issued 2005-05-31 Fiber tip based sensor system for acoustic measurements
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11038156 | | is a
continuation in part of |
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US2002000270277
| 2002-10-15 |
|
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US6901176 issued 2005-05-31 Fiber tip based sensor system for acoustic measurements
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