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 Title: |
US3795452:
INSTRUMENT FOR AUTOMATICALLY INSPECTING INTEGRATED CIRCUIT MASKS FOR PINHOLES AND SPOTS
[ Derwent Title ]
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| Country: |
US United States of America
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| Inventor: |
Bourdelais, Roger J.; Essex Junction, VT
Colangelo, Dominick; Camillus, NY
McFadyen, Robert J.; Syracuse, NY
Elliott, James F.; Syracuse, NY
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| Assignee: |
The United States of America as represented by the Secretary of the Air Force, Washington, DC
other patents from UNITED STATES OF AMERICA, AIR FORCE (597180) (approx. 4,754)
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| Published / Filed: |
1974-03-05
/ 1973-02-28
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| Application Number: |
US1973000336585
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| IPC Code: |
Advanced:
G01N 21/956;
Core:
G01N 21/88;
IPC-7:
G01N 21/16;
G01N 21/32;
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| U.S. Class: |
Current:
356/237.1;
250/559.42;
348/126;
356/237.5;
356/431;
Original:
356/237;
179/DIG.37;
250/219.DF;
350/081;
356/200;
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| Field of Search: |
356/237,200
250/219 DF
179/DIG. 37
350/081
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| Priority Number: |
| 1973-02-28 |
US1973000336585 |
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| Abstract: |
An apparatus for automatically detecting pinholes and spots in an integrated circuit photographic mask. The photographic mask is scanned by a television-type camera through a microscope to detect imperfections. Signals representing the imperfection are processed in logic circuitry.
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| Primary / Asst. Examiners: |
Wibert, Ronald L.; McGraw, V. P.
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| Family: |
None
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First Claim:
Show all 3 claims |
1. A photographic mask inspection apparatus for automatically inspecting integrated circuit photographic masks for pinholes and spots comprising in combination:
- an optics system to provide a field of view of the photographic mask,
- a television camera in alignment with said optics system, said television camera scanning said field of view provided by said optics system, said field of view presenting an image on the target of said television camera, said image being processed by said television camera to provide video signals, and
- a video processor and logic decision circuit to receive and process said video signals, said video processor and logic decision circuit filtering and shaping said video signal to improve the signal to noise ratio of said video signal, said video signals being shaped into a train of pulses, said train of pulses being processed to determine the number of pinholes and spots, the number of pinholes being counted, stored, and displayed the
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| Background / Summary: |
Show background / summary
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| Drawing Descriptions: |
Show drawing descriptions
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| Description: |
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| Forward References: |
Show 10 U.S. patent(s) that reference this one
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