 |
|
|
|
|
|
 Title: |
US4583298:
Auto calibration method suitable for use in electron beam lithography
[ Derwent Title ]
|
| Country: |
US United States of America
|
| |
| Inventor: |
Raugh, Michael R.; Palo Alto, CA
|
| Assignee: |
Hewlett-Packard Company, Palo Alto, CA
other patents from HEWLETT-PACKARD COMPANY (250060) (approx. 10,220)
News, Profiles, Stocks and More about this company
|
| Published / Filed: |
1986-04-22
/ 1984-03-07
|
| Application Number: |
US1984000587084
|
| IPC Code: |
Advanced:
G01B 11/00;
G01B 15/00;
G03F 9/00;
H01J 37/304;
H01L 21/027;
H01L 21/30;
Core:
more...
IPC-7:
G01C 25/00;
|
| U.S. Class: |
Current:
033/502;
033/001.R;
033/01C.C;
073/001.75;
073/001.79;
Original:
033/502;
033/001.CC;
033/001.R;
073/001.R;
|
| Field of Search: |
073/1 R,1 E,1 J,1 D
033/502,1 BB,1 R,1 CC
|
| Priority Number: |
| 1984-03-07 |
US1984000587084 |
|
| Abstract: |
A method of selecting values for parameters in a calibration map used to correct for measurement errors. The locations of points in a grid on an uncalibrated calibration plate are measured for different orientations of the calibration plate. The parameters in the calibration map and the parameters relating the orientations of the calibration plate are determined to minimize the deviation from congruence of the image under the calibration map of the grid in each orientation. The orientations should be related by rigid motions having rotation axes that are separated sufficiently to remove uncertainties in the calibration which arise if the rotation axes are all collinear or nearly collinear.
|
| Attorney, Agent or Firm: |
Frazzini, John A. ;
|
| Primary / Asst. Examiners: |
Martin, Jr., William D.;
|
| Maintenance Status: |
E2 Expired Check current status
CC Certificate of Correction issued
|
| INPADOC Legal Status: |
Show legal status actions
Family Legal Status Report
|
| Family: |
Show 2 known family members
|
First Claim:
Show all 17 claims |
I claim:
1. A method of calibrating measurement values produced by a measuring device, said method being of the type in which a calibration map is used to map measured values into a calibrated coordinate system to correct for distortions in the measurement process, in which the calibration map contains a first set of parameters that are determined by the calibration method and in which the locations of points in a grid on a calibration plate are measured, said method comprising the steps of:
- (a) orienting the calibration plate in a plurality of different orientations related to one another by the physical values of a second set of parameters, one of said orientations being referred to herein as the reference orientation and the other orientations being referred to herein as non-reference orientations;
- (b) for each orientation, measuring the locations of the points in the grid;
- (c) for each orientation, by use of the calibration map, determining the calibrated measured values for each grid point, thereby producing in the calibrated coordinate system an image of the grid for that orientation;
- (d) selecting numerical values for the first and second sets of parameters to minimize the deviation from congruence with one another of the images of the grid in the calibrated coordinate system.
|
| Background / Summary: |
Show background / summary
|
| Drawing Descriptions: |
Show drawing descriptions
|
| Description: |
Show description
|
| Forward References: |
Show 16 U.S. patent(s) that reference this one
|
