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 Title: |
US5352656:
Method for the chemical vapor deposition of group IB and group VIIIB metal barrier layers
[ Derwent Title ]
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| Country: |
US United States of America
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| Inventor: |
Lackey, Walter J.; Marietta, GA
Hanigofsky, John A.; Smyrna, GA
Hill, David N.; Chamblee, GA
Shapiro, Michael J.; Fairfax, VA
Barefield, E. Kent; Decatur, GA
Carter, William B.; Atlanta, GA
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| Assignee: |
Georgia Tech Research Corporation, Atlanta, GA
other patents from GEORGIA TECH RESEARCH CORP. (221085) (approx. 433)
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| Published / Filed: |
1994-10-04
/ 1992-03-17
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| Application Number: |
US1992000852813
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| IPC Code: |
Advanced:
B05D 7/24;
C23C 16/30;
C23C 16/40;
C23C 16/44;
C23C 16/448;
H01L 39/24;
Core:
more...
IPC-7:
B05D 5/12;
C23C 16/00;
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| ECLA Code: |
B05D7/24C; C23C16/40N; C23C16/448B; C23C16/448D; C23C16/448H; H01L39/24J2P4;
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| U.S. Class: |
Current:
505/434;
427/062;
427/123;
427/124;
427/125;
427/250;
505/473;
505/701;
505/702;
505/730;
Original:
505/434;
505/730;
505/701;
505/702;
505/473;
427/062;
427/250;
427/125;
427/124;
427/123;
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| Field of Search: |
427/250,125,124,123,62
505/001,730,701,702
118/715,726
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| Priority Number: |
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| Abstract: |
A method for applying a metal film barrier layer between a substrate and a superconductor coating or over a superconductivity coating using chemical vapor deposition in which low vapor pressure reactants are used, is disclosed, which comprises the steps of providing a substrate and a quantity of metal-bearing reagent and one or more reagents, placing the substrate within the furnace, introducing the metal-bearing reagent by a powder feeder means and then the reagents at different times into and reacting them in the furnace, resulting in the deposition first of a coating of metal onto the substrate and then of a coating consisting essentially of the superconducting reactant components onto the metal film; said reagents generally chosen to yield the group of oxide superconductors.
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| Attorney, Agent or Firm: |
Deveau, Colton & Marquis ;
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| Primary / Asst. Examiners: |
King, Roy;
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| Maintenance Status: |
E2 Expired Check current status
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| INPADOC Legal Status: |
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| Foreign References: |
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| Other Abstract Info: |
CHEMABS 116(04)032748E
CHEMABS 121(24)290180Q
CHEMABS 121(24)290180Q
DERABS C1994-316209
DERABS C1991-177908
DERABS C1994-316209
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| Other References: |
Voorhoeve, R. J. H. et al., "Selective Deposition of Silver on Silicon by Reaction with Silver Fluoride Vapor", J. Electrochem. Soc., vol. 119, pp. 364-368 (Mar. 1972).
Anonymous, "Laser Chemical Vapor Deposition of Silver," Research Disclosure, vol. 363, p. 146 (Mar. 1986).
Oehr, C. et al., "Deposition of Silver Films by Plasma-Enhanced Chemical Vapour Deposition", Appl. Phys. A., vol. 59, pp. 691-696 (1989).
(6 pages)
Cited by 2 patents
Mogro-Campero, A. et al., "Thickness and Annealing Dependence of the Superconducting Transition Temperature of YBa2 Cu3 O7-x Thin Films", Appl. Phys. Lett., vol. 53, p. 2566 (1988).
(3 pages)
Cited by 2 patents
Fujino, K., "Effect of Indium-Tin Oxide Buffer Layers on Superconducting Y-Ba-Cu-O Thin Films with Glass Substrates".
Jpn. J. Appl. Phys., vol. 28, No. 2, pp. L236-L238 (Feb. 1989).
Truman, J. K. et al., "Investigation of SrTiO3 Barrier Layers for RF Sputter-Deposited Y-Ba-Cu-O Films on Si and Sapphire", Published by the Dept. of Materials Science and Engineering, University of Florida (1988).
Ma, Q. Y. et al., "Interdiffusion Between Si Substrates and YBaCuO Films," Reprint from materials distributed at International M2 S-HTSC Conference, Stanford, California (Jul. 1989).
Chen, J. M. et al., "Study of Interaction Between ZrO2 (YSZ) Substrates and YBa2 Cu3 O7-δ Superconducting Films", Appl. Phys. A., vol. 48, pp. 277-281 (1989).
(5 pages)
Singh, R. et al., "Preparation of BaF2 Films by Metal Organic Chemical Vapor Deposition", Published by the School of Electrical Engineering and Computer Science, University of Oklahoma, Norman (1989).
Hollabough et al., "Chemical Vapor Deposition of ZrC Made by Reactions of ZrCl4 with CH4 and with C3 H6," Nod. Tech., vol. 35, No. 9, p. 527 (1977).
(9 pages)
Cited by 2 patents
Gurvitch, M. et al., "Preparation and Substrate Reactions of Superconducting Y-Ba-Cu-O Films", Appl. Phys. Lett., vol. 51, No. 13, pp. 1027-1029 (Sep. 1987).
(3 pages)
Cited by 41 patents
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