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Title: US5432352: Ion beam scan control
[ Derwent Title ]

Country: US United States of America

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36 pages

 
Inventor: van Bavel, Marcus; Elgin, TX

Assignee: Eaton Corporation, Cleveland, OH
other patents from EATON CORPORATION (161150) (approx. 4,296)
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Published / Filed: 1995-07-11 / 1994-02-08

Application Number: US1994000193436
IPC Code: Advanced: H01J 37/317;
Core: more...
IPC-7: H01J 37/20;

ECLA Code: H01J37/317A;

U.S. Class: Current: 250/492.21; 250/440.11;
Original: 250/492.21; 250/440.11;

Field of Search: 250/492.2,492.1,492.21,442.11,440.11,492.3

Priority Number:
1994-02-08  US1994000193436

Abstract: A scan control for use with an ion implantation system. A servo motor having an output shaft scans a wafer support through an ion beam to controllably treat the wafer. A digital signal processor monitors an encoder output corresponding to motor shaft orientation and compares this position with a desired position of the wafer support. An error signal modifies a motor energization signal based on this comparison. Velocity damping based upon sensed motor speed and wafer support speed smooths the scan motion via a second motor energization correction.

Attorney, Agent or Firm: Watts, Hoffmann, Fisher & Heinke ;

Primary / Asst. Examiners: Berman, Jack I.; Beyer, James
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Related Applications:
Application Number Filed Patent Pub. Date  Title
US1993000123148 1993-09-20       


       
Parent Case:

RELATED APPLICATION
    The present application is a continuation-in-part of application Ser. No. 08/123,148, filed Sep. 20, 1993, now abandoned, entitled "Ion Beam Scan Control."

Designated Country: DE FR GB IT 

Family: Show 7 known family members
First Claim:
Show all 16 claims		 I claim:     1. In an ion implanter that treats a wafer by scanning the wafer through an ion beam, a method for controlling a relative movement between the wafer and the beam comprising the steps of:
  • a) coupling a motor to a wafer support by means of a transmission that converts rotary movement of a motor output shaft to translational movement of the wafer support;
  • b) activating the motor to provide a scan of the wafer through an ion beam impinging onto the wafer;
  • c) monitoring a position of the motor shaft to provide a first position signal and monitoring a position of the wafer support to provide a second position signal;
  • d) comparing the first position signal with a target motor position signal to produce a position error signal for energizing the motor;
  • e) determining instantaneous motor shaft velocity and wafer velocity based upon the first and second position signals as the motor scans the wafer through the ion beam;
  • f) modifying the position error signal with a damping correction factor based upon the shaft and wafer velocities and using the modified position error signal to energize the motor.
    •


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Forward References: Show 23 U.S. patent(s) that reference this one

       
U.S. References: Go to Result Set: All U.S. references   |  Forward references (23)   |   Backward references (6)   |   Citation Link

Buy
PDF		 Patent  Pub.Date  Inventor Assignee   Title
Buy PDF- 31pp US4125828  1978-11 Resnick et al.  Med-El Inc. Method and apparatus for automated classification and analysis of cells
Buy PDF- 12pp US4749867  1988-06 Matsushita et al.  Canon Kabushiki Kaisha Exposure apparatus
Buy PDF- 9pp US5229615  1993-07 Brune et al.  Eaton Corporation End station for a parallel beam ion implanter
Buy PDF- 9pp US5262651  1993-11 Frazier et al.  Texas Instruments Incorporated Positron beam lithography
Buy PDF- 11pp US5323012  1994-06 Auslander et al.  The Regents of the University of California Apparatus for positioning a stage
Buy PDF- 6pp US5326979  1994-07 Kawasaki et al.  Hitachi, Ltd. Electron beam lithography system
       
Foreign References: None

Other Abstract Info: DERABS G95-117204

Other References:
  • Ray, A., Dykstra, J. & Simonton, R., "Overview of Eaton NV-8200P High Beam Purity, Parallel Scanning Implanter." To the best of Applicant's knowledge, this article was presented at a conference on Sep. 21, 1992 in Gainesville, Fla.


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