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 Title: |
US5629918:
Electromagnetically actuated micromachined flap
[ Derwent Title ]
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| Country: |
US United States of America
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| Inventor: |
Ho, Chih-Ming; Rancho Palos Verdes, CA
Miu, Denny K.; Valencia, CA
Leu, Jeremy Tzong-Shyng; Plainsboro, NJ
Miller, Raanan; Pasadena, CA
Desai, Amish; Pasadena, CA
Liu, Chang; Pasadena, CA
Tsao, Tom; Pasadena, CA
Tai, Yu-Chong; Pasadena, CA
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| Assignee: |
The Regents of the University of California, Oakland, CA
California Institute of Technology, Pasadena, CA
other patents from UNIVERSITY OF CALIFORNIA, THE REGENTS OF (599425) (approx. 4,840)
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| Published / Filed: |
1997-05-13
/ 1995-01-20
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| Application Number: |
US1995000377018
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| IPC Code: |
Advanced:
H02K 57/00;
Core:
more...
IPC-7:
B44C 1/22;
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| ECLA Code: |
H02K57/00;
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| U.S. Class: |
Current:
310/40M.M;
216/022;
Original:
369/112;
216/022;
310/040.MM;
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| Field of Search: |
369/126,124,112
910/309,40 MM,254
216/013,17,2,22
060/520,698
029/598
250/289
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| Government Interest: |
The U.S. Government has certain rights in this invention pursuant to Grant No. F 49620-1-93-0332 and F 49620-94-1-0008 awarded by the U.S. Air Force.
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| Priority Number: |
| 1995-01-20 |
US1995000377018 |
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| Abstract: |
A surface micromachined micromagnetic actuator is provided with a flap capable of achieving large deflections above 100 microns using magnetic force as the actuating force. The flap is coupled by one or more beams to a substrate and is cantilevered over the substrate. A Permalloy layer or a magnetic coil is disposed on the flap such that when the flap is placed in a magnetic field, it can be caused to selectively interact and rotate out of the plane of the magnetic actuator. The cantilevered flap is released from the underlying substrate by etching out an underlying sacrificial layer disposed between the flap and the substrate. The etched out and now cantilevered flap is magnetically actuated to maintain it out of contact with the substrate while the just etched device is dried in order to obtain high release yields.
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| Attorney, Agent or Firm: |
Dawes, Daniel L. ;
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| Primary / Asst. Examiners: |
Epps, Georgia Y.; Chu, Kim-Kwok
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| INPADOC Legal Status: |
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Family Legal Status Report
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| Designated Country: |
CA EP JP KR SG
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| Family: |
Show 8 known family members
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First Claim:
Show all 33 claims |
We claim:
1. A microelectromechanical magnetic actuator comprising:
- a substrate having a surface;
- a micromachined flap defined from said surface of said substrate and separated therefrom;
- at least one micromachined cantilevered beam defined from said surface of substrate coupling said flap to said substrate;
- a magnetic layer disposed on said flap; and
- a selectively actuatable magnetic field source disposed proximate to said actuator to create a magnetic field in the vicinity of said flap to bend said flap on said cantilevered beam in a predetermined direction to the plane of said surface of said substrate,
- whereby a magnetically actuated flap is provided which is selectively disposable out of said surface of said substrate.
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| Background / Summary: |
Show background / summary
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| Drawing Descriptions: |
Show drawing descriptions
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| Description: |
Show description
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| Forward References: |
Show 107 U.S. patent(s) that reference this one
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| Foreign References: |
None
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| Other Abstract Info: |
DERABS G96-371652
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| Other References: |
W. Gu et al., AIAA Journal, vol. 31, pp. 1177-1186, (Jul. 1993).
(10 pages)
[ISI abstract]
K. Rinoie, Aeronautical Journal, vol. 97 (961), pp. 33-38 (Jan. 1993).
(6 pages)
[ISI abstract]
I.J. Busch-Vishniac, "The Case for Magnetically driven Microactuators," Sensors and Actuators, A33 at 207-20 (1992).
(14 pages)
Cited by 2 patents
[ISI abstract]
C.H. Ahn et al., IEEE J. Microelectromechanical Systems, vol. 2 (1) at 15-22 (Mar. 1993).
H. Guckel et al., 1993 IEEE Workshop on Microelectronmechanical Systems at 7-11 (1993).
B. Wagner et al., Sensors and Actuators A(32) at 598-03 (1992), "Microactuators with moving magnets for linear, torional or multiaxial motion".
(6 pages)
Cited by 6 patents
[ISI abstract]
S.W. Yuan, Foundations of Fluid Mechanics, Prentice Hall (1972).
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