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Title: US5698328: Diamond thin film electron emitter
[ Derwent Title ]


Country: US United States of America

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16 pages

 
Inventor: Bunshah, Rointan F.; Playa del Rey, CA
Jou, Shyankay R.; Santa Monica, CA
Doerr, Hans J.; Westlake Village, CA

Assignee: The Regents of the University of California, Oakland, CA
other patents from UNIVERSITY OF CALIFORNIA, THE REGENTS OF (599425) (approx. 4,840)
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Published / Filed: 1997-12-16 / 1995-04-21

Application Number: US1995000426223

IPC Code: Advanced: C23C 14/06; C23C 14/32; C23C 14/34; C23C 16/27; H01J 1/304;
Core: C23C 16/26; more...
IPC-7: C01B 31/06;

ECLA Code: C23C14/06B2; C23C14/32; C23C14/34; C23C16/27K2B; H01J1/304B; T01J201/304D4B;

U.S. Class: Current: 428/408; 423/446; 427/577; 438/020; 438/105;
Original: 428/408; 423/446; 156/DIG.68;

Field of Search: 428/408,704 423/446

Priority Number:
1995-04-21  US1995000426223
1994-04-06  US1994000223693

Abstract:     Doped and undoped polycrystalline and noncrystalline diamond films produced by plasma enhanced chemical transport emit electrons into a vacuum in response to an applied electrical field. The field required to create emission is less than 20 V/ mu m for doped polycrystalline films, can be in the range of 5 to 8 volts/ mu m for undoped nanocrystalline films and may be 3 volts/ mu m or less for doped nanocrystalline films. These materials exhibit emission properties which are continuous across the whole surface of the film.

Attorney, Agent or Firm: Ram, Michael J. ; Kleinberg, Marvin H. ; Lerner, Marshall A. ;

Primary / Asst. Examiners: Turner, Archene;

Maintenance Status: E2 Expired  Check current status

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Related Applications:
Application Number Filed Patent Pub. Date  Title
US1994000223693 1994-04-06       


       
Parent Case:

BACKGROUND
    This application is a continuation in part to U.S. application Ser. No. 08/223,693 filed Apr. 6, 1994 now abandoned.

Designated Country: AU CA EP JP  CA CN EP JP KR SG  DE FR GB 

Family: Show 10 known family members

First Claim:
Show all 10 claims
What is claimed is:     1. A polycrystalline diamond film doped with boron, said film being suitable for use as a cold field electron emitter and having a threshold emission field of less than 18 V/µm, said emission property being continuous across the surface of the film.

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Forward References: Show 8 U.S. patent(s) that reference this one

       
U.S. References: Go to Result Set: All U.S. references   |  Forward references (8)   |   Backward references (6)   |   Citation Link

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PDF
Patent  Pub.Date  Inventor Assignee   Title
Buy PDF- 10pp US4740263  1988-04 Imai et al.  Imai; Yoshio Process for preparing thin film and p-type diamond semiconductor
Buy PDF- 15pp US5180951  1993-01 Dworsky et al.  Motorola, Inc. Electron device electron source including a polycrystalline diamond
Buy PDF- 12pp US5221411  1993-06 Narayan  North Carolina State University Method for synthesis and processing of continuous monocrystalline diamond thin films
Buy PDF- 5pp US5243170  1993-09 Maruyama et al.  Agency of Industrial Science and Technology Method for deposition of hexagonal diamond using hydrogen plasma jet
Buy PDF- 24pp US5374318  1994-12 Rabalais et al.  University of Houston Process for the deposition of diamond films using low energy, mass-selected ion beam deposition
Buy PDF- 9pp US5430348  1995-07 Kane et al.  Motorola, Inc. Inversion mode diamond electron source
       
Foreign References:
Buy
PDF
Publication Date IPC Code Assignee   Title
Buy PDF- 29pp EP0706196A2 1996-04  H01J 1/30 MATSUSHITA ELECTRIC IND CO LTD An electron emission cathode; an electron emission device, a flat display, a thermoelectric cooling device incorporating the same; and a method for producing the electron emission cathode 
Buy PDF- 18pp WO9522168 1995-08  H01J 1/30 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA DIAMOND-GRAPHITE FIELD EMITTERS 
Buy PDF- 32pp WO9522169 1995-08  H01J 1/30 DU PONT DIAMOND FIBER FIELD EMITTERS 


Other Abstract Info: CHEMABS 124(02)019717Q CHEMABS 128(07)083321R CHEMABS 125(26)345343K CHEMABS 128(07)083321R DERABS C1995-366406 DERABS C1996-485965

Other References:
  • Wang, C. et al, "Cold Field Emission From CVD Diamond Films Observed in Emissionn Electron Microscopy," Electronics Letters, vol. 27, Nr. 16, pp. 1459-1461, (1 Aug. 1991). (3 pages) Cited by 15 patents [ISI abstract]
  • Kumar, N. et al., "6-1: Development of Nano-Crystalline Diamond-Based Field-Emission Displays,", SID International Symposium Digest of Technical Papers, San Jose, vol. 25, pp. 43-46, (14 Jun. 1994).
  • Patent Abstracts of Japan, vol. 95, No. 005 & JP,A,07 130981 (Canon Inc.), 19 May 1995.


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