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 Title: |
US6024526:
Integrated prober, handler and tester for semiconductor components
[ Derwent Title ]
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| Country: |
US United States of America
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| Inventor: |
Slocum, Alexander H.; Bow, NH
Muller, Luis A.; Cambridge, MA
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| Assignee: |
Aesop, Inc., Concord, NH
other patents from ADVANCED ENGINEERING SYSTEMS, OPERATIONS & PRODUCTS, INC. (7695) (approx. 31)
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| Published / Filed: |
2000-02-15
/ 1995-10-20
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| Application Number: |
US1995000546236
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| IPC Code: |
Advanced:
B25J 17/02;
H01L 21/00;
H01L 21/683;
Core:
H01L 21/67;
more...
IPC-7:
B25J 15/06;
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| ECLA Code: |
B25J17/02B2; H01L21/00S8D; H01L21/00S8; H01L21/683V;
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| U.S. Class: |
Current:
414/226.01;
901/040;
Original:
414/226.01;
901/040;
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| Field of Search: |
414/222,225,226,403,729,736,737,222.01,225.01,226.01
901/028,29,47,8,16,40
294/64.1,65
029/832,833,834,740
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| Priority Number: |
| 1995-10-20 |
US1995000546236 |
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| Abstract: |
An integral unit for use in testing semiconductor components. The unit is designed to manipulate either packaged semiconductor components or semiconductor wafers and present them to a test head. It provides significant space savings because it replaces the need for separate prober, handler and tester units. The integrated unit includes a positioning mechanism with a tool plate that can be changed to grasp either a semiconductor wafer or a tray of semiconductor components. The tool plate uses a vacuum plate. To hold a tray of semiconductor parts, the vacuum plate has numerous independently operable holes. Each hole is positioned behind one semiconductor component and can be engaged or released separately so that the components can be sorted into separate output bins. To hold a wafer, the tool plate has an extendible tongue member that can be inserted into a stack of semiconductor wafers to pick up one wafer in the stack. One disclosed positioning mechanism is a hexapod unit, which, due to its light weight, allows fast and accurate positioning of the semiconductor devices. Multiple positioning mechanisms are used in some instances to increase throughput.
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| Attorney, Agent or Firm: |
Walsh, Edmund J. ;
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| Primary / Asst. Examiners: |
Underwood, Donald W.;
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| INPADOC Legal Status: |
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Family Legal Status Report
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| Designated Country: |
CN EP JP KR
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| Family: |
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First Claim:
Show all 29 claims |
What is claimed is:
1. Apparatus for processing a plurality of semiconductor devices held in a tray, comprising:
- a) a base;
- b) an input zone in the base adapted to hold the tray;
- c) a work station, coupled to the base, at which semiconductor devices are processed;
- d) a positioning mechanism having a distal portion and a coupling between the base and the distal portion, the coupling being movable with a range of motion encompassing at least the input zone and the work station and being further movable with degrees of freedom allowing the distal portion to be tilted relative to the input zone; and
- e) a tray pickup, connected to the distal portion of the positioning mechanism, the tray pickup including means for selectively releasing semiconductor devices without releasing the tray.
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| Background / Summary: |
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| Drawing Descriptions: |
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| Description: |
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| Forward References: |
Show 21 U.S. patent(s) that reference this one
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